Beilstein J. Nanotechnol.2022,13, 390–403, doi:10.3762/bjnano.13.32
researchers a more comprehensive understanding of the pull-in phenomenon and the development of its applications. Also, the review is meant to provide a reference for engineers to design and optimize devices.
Keywords: electrostatics; MEMS; microfluidics; NEMswitches; pull-in; Introduction
It has become
structure of the flexible devices. Nanoelectromechanical (NEM) switches made of carbon nanotubes (CNTs) [2][3][4], graphene (GR) [5][6][7], nanowires (NWs) [8][9][10], and other flexible materials are the most basic devices for a variety of component and system level applications, such as low-loss switches
, phase shifts, and relays.
In this paper, the state of the art of electrostatic pull-in phenomena in flexible devices is discussed, and the influence of different electrode structures in NEMswitches is classified and discussed. In addition, the applications of NEMswitches in radio frequency (RF
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Figure 1:
The lumped parameters model of the pull-in phenomenon between parallel plates. Figure 1 was redrawn from [11].
Beilstein J. Nanotechnol.2018,9, 271–300, doi:10.3762/bjnano.9.29
actuated nanobeam-based nanoelectromechanical (NEM) switches. The main switch architectures and structural elements are briefly described and compared. Investigation methods that allow for exploring coupled electromechanical interactions as well as studies of mechanically or electrically induced effects
: nanocontacts; nanoelectromechanical switches; nanowires; NEM; reliability; Review
Introduction
Nanoelectromechanical (NEM) switches represent a class of nanoscale devices, integrating both electrical and mechanical functionality of nanostructures to process external stimuli applied to the device and
controlling the electrical current. NEMswitches have attracted attention as low-power [1] devices, demonstrating abrupt on/off switching characteristics and minimized sub-threshold swing, as well as reduced leakage currents leading to improved on/off ratios [2]. In the context of existing
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Figure 1:
Schematics of electrostatically actuated 2T NEM nanobeam-based switches. Top panel: single-clamped ...